Q&T Micro Thermal Gas Mass Flow Meters use MEMS-based thermal measurement principle, where micro-heaters and temperature sensors on a silicon chip detect heat transfer changes caused by gas flow. This provides high sensitivity, fast response, and accurate measurement, especially for ultra-low flow rates, without pressure or temperature compensation.
Suitable for dry air, nitrogen, and other non-corrosive gases, the compact meter offers high accuracy, wide turndown ratio, low pressure loss, and supports 4–20 mA and RS485 outputs for easy integration.
Typical applications include laboratories, medical devices, chemical processing, energy systems, oil and gas, and research.
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